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The SEM has a large depth of field, high resolution, and magnification of hundreds of thousands of times. It can be used to observe the surface and profile microstructure of the sample. If an Energy Dispersive Spectrometer (EDS) is installed on the equipment, the material surface of the sample can be simultaneously analyzed in the micro-area, including qualitative and semi-quantitative component analysis, and Point, Line Scan, and Mapping for specific areas. analysis.

Semiconductor chip profile observation